Semiconductor Equipment Support & Training
HOME | OVERLAY REFURB | USED TOOLS | REPAIRS | TRAINING | PARTS | JOBS | ABOUT | CONTACT
Copyright © 2018 PSL Metrology Group
KLA Tencor Spare Parts
PSL Metrology carry a wide selection of KLA Tencor related wafer handler systems such as:
- PRI-Brooks & Yaskawa robots, pre-aligners & controllers.
- Asyst Series 3 & IsoPort load ports
- PRI-Brooks & Yaskawa robots, pre-aligners & controllers.
- Asyst Series 3 & IsoPort load ports
Select (click) on the platform name below for our parts lists. Or you can search our available spare list using the search function.
To find all compatible parts, search main part number only, leaving out the revision numbers.
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004").
To find all compatible parts, search main part number only, leaving out the revision numbers.
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004").
Search Part Number or Description
