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KLA Tencor Spare Parts
Scroll through the list below or use the search function. To find all compatible parts, search main part number only, leaving out the revision numbers. 
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004"). 
Search Part Number or Description
Please Contact Us for any KLA Tencor spare part not listed here.
Spare Parts Listing for Overlay 5300
Tool Type
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
5300 Overlay
OEM Part Number
050-450081-00
720-482040-000
720-482128-000
712-482041-000
750-480037-001
716-480428-000 
750-480006-00 
750-482420-000
716-480009-001
716-480429-000
750-482414-000
750-482417-000
750-482418-000
760-480542-000
720-480036-00
720-480046-001
030-450519-00
710-480099-002
720-480018-001 
716-480011-00
716-480011-001
710-404420-00
710-471477-001
710-480101-002
070-450916-00
710-471773-000
710-404582-00
718-482633-000
750-400159-00
750-482421-000
752-471642-000
752-471713-000
718-471782-002
752-471598-000
712-475001-000
712-475001-001
750-480037-00 
716-480928-000
127-483105-000
760-480542-001
450-482762-000
030-480157-00
710-450818-001
720-480022-000
720-480046-00
450-482760-000
050-404714-00
070-480031-00
070-480158-00
750-482031-000
716-480413-001
740-482301-000
716-480374-000
716-480375-000
712-471901-000
712-482130-000
720-480045-001
564-480908-000
712-404561-00
750-482327-000
750-482328-000
OEM Description
LONG LIFE FILAMENT LAMP 24V/50-80mA,SKT;BA9S
AMS LAMP REPLACEMENT ILLUMINATION MODULE 840u
AMS LAMP REPLACEMENT ILLUMINATION MODULE 12Ku
LINNIK CAMERA & CONTROL (I-SIGHT)
IDE CONTROLLER TYPE 395.000
5300 XYT STAGE SCHNEEBERGER;565 090 467
5300 MOTION CONTROLLER ELECT.UNIT SCHNEEBERGER;565
T STAGE ASSY SCHNEEBERGER;565 090 399
5300 MOTION SYSTEM PURCHASED (controller)
5300 "Z" STAGE SCHNEEBERGER;565 090 401
X/Y MOTOR DRIVER WITH A/O BOARD ASSY SHNEEBERGER;5
T/Z/L CONTROLLERS BOARD-STANDARD DSB2 SCHNEEBERGER
CONTROLLER POWER SUPPLY SCHNEEBERGER;565 001 119
FRM (Linnik - Main Optics Assembly)
5300 "AMS" ASSY
5300 SHUTTER ASSY
COHU CAMERA MOD.6312-2001/0000
5300 PZT DRIVER BOARD ASSY
5300 HALOGEN LIGHT SOURCE (HLS) ASSY
5300 FLOTATION type A
5300 FLOTATION type B
I/O BOARD
5300 ADAPTER BOARD
5300 INTERFACE BOARD
POWER,SUPPLY,QALIDYNE,LAMBDA;284B E1[A]
PEARL PZT ADAPTER BOARD
NEW PZT CONTROLLER BOARD
5300 CPU BOARD ASSY (16MB)
DIGITIZER MATROX VIP 1024
Z MOTOR ASSY-ENCODER & MOTOR SCHNEEBERGER;565 090
TRACKBALL LOGITECH;TRACKMAN MARBLE THUMB OPERATED
XP - MONITOR, 21 INCH, VGA VIEWSONIC;P810
XP COMPUTER ELMA;010-0225-002
XP KEYBOARD CHERRY;G81-1800-LPAUS
PEARL-ELECTRONIC TRAY ASSY
5300 ELEC.VME TRAY ASSY
5300 DIGITAL FLOTATION CONTROL BOARD
5300 LIGHT MOTOR ASSY SCHNEEBERGER;565 090 464
HLS LAMP (BURN-IN) 50W/12V;OSRAM_46870SP
5300- OPTICAL COLUMN ASSY (FRM)
Z PZT P.I.;P-953-11
I SIGHT CAMERA ISC 2050 (RS170)
5XXX PIN DIODE BOARD ASSY
5300 DUAL APERTURE
PEARL FAST SHUTTER
P PZT P.I.;P-952-11
LAMP BULB 30V/0.11A FOR 24V SIGNAL TOWER
MAIN POWER SUPPLY VICO;VI-RUO13-EYXV
HALOGEN POWER SUPPLY 12V/75W VICOR;VI-LU1-EX
FFU HIGH TOP SYSTEM INFAB
8" - 12" CHUCK FOR 5300
5300 5"-8" CHUCK ASSY
VACUUM PANEL ASSY
AIR PANEL ASSY
VACUUM SWITCHES ASSEMBLY - FOR PEARL
5300 FAN ASSY
5300 PM TARGET
Vacuum Filter
8MB MEMORY BOARD
VME Fan
VME Back Plan
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