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KLA Tencor Spare Parts
Scroll through the list below or use the search function. To find all compatible parts, search main part number only, leaving out the revision numbers. 
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004"). 
Search Part Number or Description
Please Contact Us for any KLA Tencor spare part not listed here.
Spare Parts Listing for SP1
Tool Type
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
SP1
OEM Part Number
168807
333360
349437
508250
509167
509167
536091
537489
560545
571024
0018134-000
0029941-001
0042549-000
0049453-003
0050753-000
0058917-000
0060464-000
0061791-000
0064742-000
0083729-000
0092493-001
0103687-000
0105128-000
0224471-000
0238712-000
0278424-000
0278424-000
0283214-000
0351490-000
OEM Description
POWER SUPPLY 30MW for SP1-TBI.
PCB Assy Spindle Distribution SP1
Isolator, 488
BPS-Cal Pin SP1
Isolator, 488
SP1 ISOLATOR ASSY. (Isolator with mouting bracket and base plate)
BEAMSPLITTER ASSY,BF-DF,SP1-TBI.
PCB Assy BF2 Analog BD SP1 TBI
PCB Assy Actuator
LASER ASSY, SP1-DLS
ASSY, BEAMSPLITTER,SP1-DLS
PWR SUPPLY,LASER,75 MW,SP1-DLS
PCB Assy Signal Processor SP1 & SP1+ Config
PCB Assy PMT Preamp
QTR-HALF WAVE CHGR ASSY, SP1 TBI DLS
PCB Galil Motion CTRL 4-Axis
FRU,ASSY,ACAL-PIN,SP1-DLS/TQM.
PCB Assy Signal Processor 2.1 SP1
PCB Power Distr SP1
PCB Assy Analog Board
PHOTOMULTIPLIER TUBE,SP1
SP1+ ILLUMINATION POLARIZER ASSY.
30mW ARGON LASER ASSY
ASSY,LASER,ARGON,30MW,TESTED
ASSY, BEAMSPLITTER,SP1-DLS
SP1-DLS LASER ASSY,ARGON,75mW,FSB
LASER ASSY,ARGON,75mW,FSB,SP1-DLS
FRU KIT,ASSY,BEAMSPLITTER,SP1-DLS
SP1 ISOLATOR ASSY (wite base plate)
Copyright © 2018 PSL Metrology Group
Note: some parts have multiple revision numbers but are cross compatible. Contact us for clarification.