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KLA Tencor Spare Parts
Scroll through the list below or use the search function. To find all compatible parts, search main part number only, leaving out the revision numbers. 
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004"). 
Search Part Number or Description
Please Contact Us for any KLA Tencor spare part not listed here.
Spare Parts Listing for AIT
Tool Type
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
AIT UV & XUV
OEM Part Number
130303
137952
188859
319201
319213
319236
320552
328138
331996
333506
333590
344966
363251
369829
369837
369853
371343
386090
395641
396222
502561
503304
506648
506664
506672
506710
507431
508349
510440
510459
510513
514470
530859
532746
534064
538590
551279
552364
561975
0001121-000
0002416-001
0021439-000
0021441-000
0021443-000
0021445-000
0021451-000
0021451-000
0021727-001
0023690-000
0023725-000
0023885-000
0023934-005
0023935-001
0023989-000
0023990-000
0024392-000
0024492-000
0024494-000
0024495-000
0024496-000
0024503-001
0024504-000
0024514-000
0024515-000
0024516-000
0024517-000
0024734-000
0024735-000
0024736-000
0024747-000
0025038-000
0025039-000
0025044-000
0025047-000
0025048-000
0025408-000
0025409-000
0025480-000
0025837-000
0025842-000
0027106-000
0027819-000
0028380-000
0028381-000
0028443-000
0028444-000
0028446-000
0028447-000
0028464-000
0028466-000
0028469-000
0028471-000
0028474-000
0028646-000
0028648-000
0029191-000
0029446-000
0030064-000
0030066-000
0030069-000
0030071-000
0030073-000
0030075-000
0030076-000
0030077-000
0030078-000
0030080-000
0030081-000
0030082-000
0030145-000
0030148-000
0030327-000
0030399-000
0030955-000
0031279-000
0031499-002
0031501-002
0031502-000
0031504-000
0031505-000
0031506-000
0031507-000
0031508-000
0031509-000
0031510-000
0031511-000
0031512-000
0031513-000
0031514-000
0031515-000
0031603-000
0031605-000
0031739-000
0031820-001
0031821-001
0031822-000
0032040-000
0032040-002
0032041-001
0032042-001
0032128-001
0032179-000
0032290-000
0032485-000
0032486-000
0032487-000
0032488-000
0033561-000
0033935-000
0033985-000
0034117-000
0034316-000
0034818-000
0034832-000
0034833-000
0034834-000
0034835-000
0034836-000
0034843-000
0034849-000
0034850-000
0034851-000
0034984-000
0034985-000
0035162-001
0035162-002
0035162-002
0035162-002
0035390-000
0035528-000
0035627-000
0035984-000
0035987-000
0035993-000
0035994-000
0036003-000
0036476-000
0036813-000
0037183-003
0037305-001
0038216-000
0038221-000
0038222-000
0038223-000
0038224-000
0038226-000
0038289-002
0038317-000
0038517-000
0039978-000
0039978-001
0040110-000
0040143-000
0040145-000
0040146-000
0040147-000
0040149-000
0040190-000
0040191-000
0040194-000
0040211-000
0040342-000
0040367-000
0040372-000
0040477-000
0040553-000
0040556-000
0040687-000
0040688-000
0040830-000
0041581-000
0041617-000
0041621-000
0041863-000
0041977-000
0042010-000
0042235-000
0042236-000
0042240-000
0042556-000
0042589-000
0043424-000
0043775-000
0043779-000
0043781-000
0043791-000
0043794-000
0043870-000
0043876-000
0043906-000
0044220-000
0044224-000
0044952-000
0045197-000
0045272-002
0045403-000
0046883-002
0046883-002
0046884-000
0046884-000
0046886-000
0046892-000
0047986-000
0048009-000
0048009-000
0048186-000
0048310-000
0048601-000
0048932-000
0049273-000
0049592-001
0049811-000
0049870-000
0050794-000
0050860-000
0050863-000
0050978-000
0051390-000
0051391-000
0051493-002
0052078-000
0052196-004
0052216-000
0052715-000
0053579-000
0053580-000
0053582-001
0053754-000
0054150-000
0054722-000
0054755-000
0054802-000
0054829-000
0055081-000
0055082-000
0055083-000
0055084-000
0055086-000
0055087-000
0055506-000
0055550-000
0055902-000
0057637-000
0059465-000
0060536-000
0062032-000
0062035-000
0062038-000
0062041-000
0062044-000
0062048-000
0062847-000
0062858-000
0064523-000
0064931-000
0065910-003
0068376-003
0068376-003
0069660-000
0070349-000
0072201-000
0074785-000
0082023-000
0082023-000
0083642-000
0083642-000
0083644-001
0083644-001
0083649-002
0083651-000
0083651-000
0083656-000
0083665-000
0090484-000
0090484-000
0090488-002
0090488-002
0090488-002
0090974-000
0096501-000
0099586-001
0099586-001
0099750-000
0099750-000
0101833-000
0111913-000
0111913-000
0115340-000
0126839-000
0126889-000
0126889-000
0126889-000
0149369-000
0200837-000
0208937-000
0218573-000
0218586-000
0233838-000
0254629-000
0281482-000
0296821-000
0322567-000
0364392-000
319490
319490
506591
506648
561975
750-380249-000
OEM Description
SW,ROCKER,DPDT,MOM,SNAP IN
DR,FLOPPY,DISK,3-1/2IN,BLK,BEZ
PCB ASSY,4-CHAN MTR DRV,S6200
CBL ASSY,JOYSTICK,S8
CBL ASSY,HAND ENCODER,S8
CBL ASSY,KBD DATA,AIT
PCB ASSY,KYBD BREAKOUT,AIT
CBL ASSY,FLOPPY DATA CABLE
BULB,150W HALOGEN,21V,EKE
OBJ,10X,UMPLFL,B/D,BX,SF8010
TUBE,MNCLR,TELON LNS,BX,SF8010
CBL ASSY,ESD,KEYBOARD SHIELD
PCB ASSY,4CH MTR CNT 2 ,AIT
OBJ,100X.9NA,BD,.31MM WD,AIT
OBJ,50X.8NA,BD,.66MM WD,AIT
ADPTR,BX MIC DVTL/SONY CAM,AIT
PCB ASSY,6-PCI BACKPLANE,AIT
PCB ASSY,GPIO DISTR,AIT2
PCB ASSY,X-OFFSET 0IV,AIT2
FAN,24V,300MA,18INCH WR
FILTER,9-7/8X19-7/8,ALUM
CBL ASSY,POLARIZER,AIT2
MOTOR ASSY,X-OFFSET,AIT2
SENSOR ASSY,X-OFFSET,HOME,AIT2
SENSOR ASSY,X-OFFSET,LOAD,AIT2
SENSOR ASSY,Z-STAGE,HOME,AIT2
MOTOR ASSY,THETA,AIT2
Clamp,Split hub
SUPPLY, POWER, AEROTECH DR500, 5/12/24 VDC
AMP, SERVO, AEROTECH, LINEAR MOTOR DRIVER
SWITCH, OPTO, X/Y AXIS, AEROTECH
CONN,8COND,F-F,IN-LINE COUPLER,SHIELDED
MONITOR,FLAT PNL,15.0,XGA,SP1-TBI
DISPLAY ASSY,15IN FLT PNL,AIT2
CBL ASSY,VIDEO,CORONA-VIDEO SPLITTER,AIT2
PCB ASSY,MATROX CORONA REV 6,8M,CONFIG
CD-RW DRV,8X WRITE,4X RE-WRITE,32X READK,IDE
PCB ASSY,TOWER LIGHT DRVR,AIT1/2/3
MULTIPLIER,100X,ENCODER INTERPOL,1VP-P,16MHZ
FAN,220VAC,530 CFM,MINI-ENV
CONTROLLER,EQUIPE,ESC218,S293
LENS,OBJECTIVE 90MM AIT 4
LENS,RELAY 560MM AIT 4
LENS,MAG CHANGER 0.63X AIT 4
LENS,MAG CHANGER 1.43X AIT 4
LENS,TELEPHOTO RELAY AIT 4
LENS,TELEPHOTO RELAY AITXUV
PMT,LINEAR FOCUSED,MULTIALKALI CATHO
PWR SPLY,24V OUT,5A,AC-DC SWITCHER,DIN
ASSY,MASK AND POLARIZER,NNC,AIT UV
OBJECTIVE,150X B/D LM PLAN APO LWD,MICROSCOPE,AIT4
ASSY,PWR,CPM,AITUV
ASSY,110VAC XFMR,AIT UV
CAMERA,VIDEO,SONY DXC990
FILTER,IR VIDEO CAMERA
FLEXURE,LASER CLAMP,AIT UV
ASSY,PNEUMATICS PANEL,MAIN,AIT UV
ASSY,PNEUMATICS PANEL,INLET,AIT UV
ASSY,REMOVEABLE HD,AIT UV
ASSY,120V EXHAUST BLOWER,AIT UV
PDU,PILLAR,AIT UV
120 VAC,SERVICE MODULE,PILLAR
ASSY,PASSIVE ISOLATOR,FRONT RIGHT,AIT UV
ASSY,PASSIVE ISOLATOR,FRONT LEFT,AIT UV
ASSY,PASSIVE ISOLATOR,BACK RIGHT,AIT UV
ASSY,PASSIVE ISOLATOR,BACK LEFT,AIT UV
ASSY,OPTICAL,L1-L4 TUBE,NNC,AIT UV
ASSY OPTICAL,L1-L2 NOSECONE,COLL REAR,AIT UV
ASSY,OPTICAL,L1-L2 NOSECONE,COLL FRONT,AIT UV
ASSY,BLOCK,INTEGRATED CENTER,AIT UV
ASSY,MIRROR,M4/M5,AIT UV
ASSY,MIRROR,M6,AIT UV
LASER MIRROR ASSY AIT UV
Laser M2M3 servo detect assembly - ORDER THIS ONE!!!
ASSY,LASER SERVO MIRROR,AIT UV
LINE CONDITIONER, AIT UV
ASSY,REMOTE CNTRL BOX,LINE CONDITIONER,AIT UV
CABLE,FIBER-OPTIC,3FT,FULLY RANDOMIZED,AIT-UV
ASSY,MODIFIED,ILLUMINATOR BODY
ASSY,MODIFIED TURRET,MSCOPE ILLUM,AIT UV
ILLUMINATOR,FIBER-OPTIC,150W,W/RS-232,AIT UV
ASSY,PNEUMATIC PANEL,LL & LD SPEED CNTRL,AIT UV
ULPA,SIDE FLOW,PTFE,AIT UV
ULPA,MAIN,PTFE,AIT UV
LIGHT,LED,WHITE,PANEL MOUNT
LIGHT,LED,YELLOW,PANEL MOUNT,24VDC
SWITCH,PUSHBUTTON,N.C.,MOMENTARY,WHITE TOP
SWITCH,PUSHBUTTON,N.O.,MOMENTARY,GREEN LED INDICAT
CABLE,MOTOR,AIR BEARING/DR500
CABLE,FEEDBACK,AIR BEARING TO MX
CABLE,FEEDBACK,MX TO DR500
CABLE,U500 TO DR500
CABLE,SET,U500 TO DR500,I/O
CONTROLLER,U500PCI-ULTRA BAORD
MULTIPLIER, MX-10, AEROTECH ENCODER (X-axis)
PREALGN,EQPT,LOW CONT,PRE-300BU-I-CE-S2
CABLE ASSY,CAMERA VIDEO OUTPUT,AIT UV
ASSY,PANEL,UI,PAINTED,GND,AIT UV
ASSY,PANEL,TOP,RIGHT,PAINTED,GND,AIT UV
 ASSY,PANEL,TOP,ILLUM,PAINTED,GND,AIT UV
ASSY,PANEL,TOP,REAR,PAINTED,GND,AIT UV
 ASSY,PANEL,REAR,LEFT,PAINTED,GND,AIT UV
ASSY,PANEL,ILLUM,RT,PAINTED,GND,AIT UV
ASSY,PANEL,FRONT,TOP,RT,PAINTED,GND,AIT UV
ASSY,PANEL,FRONT,BOT,LF,PAINTED,GND,AIT UV
ASSY,PANEL,FRONT,BOT,RT,PAINTED,GND,AIT UV
ASSY,PANEL,MID,RIGHT,PAINTED,GND,AIT UV
ASSY,PANEL,REAR,RIGHT,PAINTED,GND,AIT UV
ASSY,PANEL,TOP,FRONT,PAINTED,GND,AIT UV
LATCH,ADJUSTABLE LEVER
ASSY,MOUNT,LENS1,APS,AIT UV
ASSY,WAFER DOOR,PAINTED,AIT UV
INTERFACE FIBER 2.5 GB I/O BOARD,image computer,AIT XP+/UV
TEE, barbed, 1/8 ID hose, 303 ss
MOUNT,AIRSLIT,ILLUM,AIT UV
CBL ASSY,ANALOG PCB TO HV PS,CH1,AIT UV
CBL ASSY,ANALOG PCB TO HV PS,CH3,AIT UV
CBL ASSY,SMA SENSE,MMD PMT,CH1,AIT UV
CBL ASSY,SMA SENSE,MMD PMT,CH2,AIT UV
CBL ASSY,SMA SENSE,MMD PMT,CH3,AIT UV
CBL ASSY,SMA LOG,MMD PMT,CH1,AIT UV
CBL ASSY,SMA LOG,MMD PMT,CH2,AIT UV
CBL ASSY,SMA LOG,MMD PMT,CH3,AIT UV
CBL ASSY,SMA DAC 0,MMD PMT,CH1,AIT UV
CBL ASSY,SMA DAC 0,MMD PMT,CH2,AIT UV
CBL ASSY,SMA DAC 0,MMD PMT,CH3,AIT UV
CBL ASSY,SMA DAC 1-GAIN,MMD PMT,CH1,AIT UV
CBL ASSY,SMA DAC 1-GAIN,MMD PMT,CH2,AIT UV
CBL ASSY,SMA DAC 1-GAIN,MMD PMT,CH3,AIT UV
CBL ASSY,HV PS TO MMD HEAD,CH1/2,AIT UV
PCB ASSY,PRE-SCAN AOD DRIVER
PCB ASSY,CHIRP AOD DRIVER
CBL ASSY,SER BUS,GPIO-AOD-ANA1,AIT UV
CBL ASSY,ANA1 J4-TIM J9,AIT UV
CBL ASSY,ANA2 J4-TIM J10,AIT UV
CBL ASSY,ANA3/J4-TIM/J11,AIT UV
CBL ASSY,PSF CTRL,AIT UV
CBL ASSY,PSF CTRL,AIT UV
CBL ASSY,PSF CTRL-ANA 2,AIT UV
CBL ASSY,PSF CTRL-ANA 3,AIT UV
COVER,VIEWPORT,AIT UV
COUPLER,USB TYPE A/B,PNL MT
CBL ASSY,M'SCOPE CTRL-M'SCOPE,AIT UV
CBL ASSY,SENSOR,1/2 PLATE EXT,AIT UV
CBL ASSY,SENSOR,1/2 PLATE HOME,AIT UV
CBL ASSY,SENSOR,1/4 PLATE EXT,AIT UV
CBL ASSY,SENSOR,1/4 PLATE HOME,AIT UV
CBL ASSY,SENSORS,POLARIZER/MASK,AIT UV
CBL ASSY,SENSOR,IN-OUT,MAG CHANGER,AIT UV
CBL ASSY,P,S,MASK,CTRL INTER,AIT UV
CBL ASSY,PSF DRVR,POLARIZER/MASK,AIT UV
CBL ASSY,SCSI DATA,CPU/P13 - HDD'S,AIT UV
CBL ASSY,POLARIZER CTRL, FRONT AND REAR,AIT UV
ASSY,PWR SUPPLY,LIN,PS1,5V/9A
ASSY,PWR SUPPLY,LIN,PS2,-15V/4.5A
ASSY,PWR SUPPLY,LIN,PS3,28V/3A
ASSY,PWR SUPPLY,LIN,PS4,15V/9A
ASSY,PWR SUPPLY,LIN,PS5,-5V/6A
CBL ASSY,SOL,POLARIZER CTRL,FRONT & REAR,AIT UV
CBL ASSY,PSF/J9 - LCD/J3 CTRL,AIT UV
CBL ASSY,PSF REAR,LCD LOWER/UPPER,J1,AIT UV
CBL ASSY,PSF FRONT, LCD LOWER/UPPER,J1,AIT UV
HUBPORT,USB,7 PORT
EDGEPORT,SERIAL CONVERTER, DB-9 - USB,8 PORT
FRU, PCB ASSY, MMD HEAD
FRU PCB ASSY,MMD MEAS HEAD
FRU PCB ASSY,MMD MEAS HEAD
FRU PCB ASSY,MMD MEAS HEAD
ASSY,WATER LEAK DETECTION
PCB ASSY,ROBOT DISTR,AIT UV
SHUTTER ASSY,AIT UV
UV LASER HEAD
UV LASER POWER SUPPLY
UMBILICAL EXTENSION (65FT)
UV LASER HEAT EXCHANGER (65FT SERVICE)
CBL ASSY,M'SCOPE-APS DRIVER,AIT UV
SENSOR,WATER LEAKAGE ASSY
OBJ,5X,MPLAN ACHRO,B/D,AIT UV
PCB ASSY,MMD MEASUREMENT HEAD
CBL ASSY,SERIAL,REMOTE I/O-ANA CH 1,AIT UV
HIGH VOLTAGE POWER SUPPLY ASSY,AIT XP
LENS,ZOOM,10% POSITIVE WAIST
LENS,ZOOM,5% POSITIVE WAIST
LENS,ZOOM,NOMINAL
LENS,ZOOM,5% NEGATIVE WAIST
LENS,ZOOM,15% POSITIVE WAIST
PCB ASSY,CRADLE PWR DISTR, AIT UV
PCB,NETWORK,INTEL PRO 100 S DESKTOP ADAPTER
CBL ASSY,TEMP SNSR,MEASUREMENT CHMBR,AIT UV
ASSY, M2/M3 SERVO BOX, AIT UV
ASSY,M2/M3 SERVO BOX,AIT UV
PCB ASSY,USCOPE BOARD,AIT UV
BULKHEAD,TOP,PANEL,PILLAR,AIT UV
DOOR,FRONT,PILLAR,AIT UV
DOOR,REAR,PILLAR,AIT UV
PANEL,SIDE,PILLAR,AIT UV
SWIVEL SENSOR,ASSY,PILLAR,AIT UV
COUPLING INSERT,WITH SHUT OFF,3/8 MALE PIPE THRD,HFC35 SERIES
COUPLING BODY,WITH SHUT OFF, 3/8 MALE PIPE THRD,HFC35 SERIES
COUPLING,ANCHOR,PARKER 207ACBH
CBL ASSY,APS4 J17 - OLYMPUS UCB,AIT UV
PCB ASSY,PIII BX SBC,800MHZ,1GB,CONFIG,AIT UV
FAN,BALL BEARING,7IN,380 CFM,230VAC
VALVE,FORGED BRASS BALL,3/4",NPT-MALE X FEMALE
FITTING,HOSE BARB,ELBOW TO MALE PIPE,3/4"
FITTING,HOSE,BARB 3/4" TO MALE PIPE 1/2" NPT
FITTING,NIPPLES,FEMALE 1/2" NPT
FITTING,NIPPLE,FEMALE 3/4" NPT
FITTING,HYD COUPLING,FEMALE 1/2" NPT
PANEL,BULKHEAD CONNECTIONS,PILLAR,AIT UV
CBL ASSY,EMO/SYS CTRLS,BLKHD,AIT UV - BLKHD,PILLAR
ASSY,VENDOR,300MM CERAMIC CHUCK,AIT XP
ASSY,300MM WARPED WAFERCERAMIC CHUCK,AIT XP
TUBING,HP PFA, 1/4OD X .047 WALL
CBL ASSY,EXTENSION,WATER LEAK DETECT,PILLAR,AIT UV
CBL ASSY,SENSOR,WATER LEAK DETECT,PILLAR,AIT UV
CBL ASSY,EDGEPORT1/PORT6 - HDLR COM6,AIT UV
CBL ASSY,EDGEPORT1/PORT7 - HDLR COM7,AIT UV
ASSY,WATER VALVE SOLENOID,CONNECTORIZED,PILLAR,AIT UV
CBL ASSY,AUTOFOCUS - BX-UCB CTRLR,AIT UV
PANEL,RIGHT SIDE SKIN,PILLAR,AIT UV
CBL ASSY,DC DIST BD J8 TO DC BLKHD,M2/M3 SERVO BOX
PCI TRIPLE UPPER FAN PACK,image computer,AIT XP+/UV
PCI LOWER FAN PACK,AIT XP+/UV,image computer
IDE INTERNAL CD ROM,image computer,AIT XP+/UV
IDE INTERNAL 3.5 IN FLOPPY DRIVE,image computer,AIT XP+/UV
CUSTOM HOT SWAP 350W MULTI PWR SUPPLY,image computer,AIT XP+/UV
UMBILICAL,PILLAR,10FT END TO END,AIT UV
POWER SUPPLY,24V,10A,AC-DC SWITCHING
850MHZ HOST CONTROLLER,image computer,AIT XP+/UV
ASSY,AUTO FOCUS,MICROSCOPE
CHASSIS,DR500,EXCLUDING AMPS,AIT-UV
Lens, Mag Changer, 1.7X, AIT UV
ASSY.,200MM MULTI-RING,AL CHUCK,AIT/XP
ASSY,CBL,208VAC,PILLAR PDU-AIT CPM,20FT
FRU,AUTOFOCUS TESTED WITH STAGE,AIT
HCD QUAD PROCESSOR BOARD,image computer,AIT XP+/UV
PCB,HCD QUAD PROCESSR,CHECKMC ENABLED,IC
MODULE,INTERLINK,PCILK4N,image computer,AIT XP+/UV
PCB, PCILK INTERLINK,image computer,AIT XP+/UV
CBL,INTERLINK,image computer,AIT XP+/UV
image computer ASSY,AIT UV
PIEZO ASSY,THETA-Z,AIT
CBL ASSY,PIEZO HV,THETA-Z,INTER.,AIT
CBL ASSY,PIEZO HV,THETA-Z,INTER.,AIT UV
WATER PAN ASSY,AIT UV
ASSY,FIBER OPTIC,BUNDLED,CHNL 1,2,3,PILLAR BLKHD-A
AMP,MOD,IR,SENSOR,ASYST LDPT S3
30 GB SCSI PCI HARD DRIVE,image computer,AIT XP+/UV
PANEL ASSY,SPLIT TOP COVER,PILLAR, AIT UV
ASSY,FINAL MECH.,THETA-Z,AIT UV
ASSY, FIBER OPT, BUNDLED,ANALOG BD.'S TO BULKHD, AIT UV
ASSY, FIBER OPTIC, BUNDLED, IMG COMP - PILLAR BLKHD, AIT UV
ASSY,CALPIN CALCHIP MOUNT,AIT UV
FRU,FLTR,MAIN,PTFE,2.75IN 35MM,33.00 X 20.00
FRU,FLTR,SIDE PTFE,2.75 IN,35MM,18.00 X 12.00
PCB ASSY,PSF DRIVER,AIT UV
AOD,CHIRP,363.8NM
CHIRP AOD SPLITTER/DELAY LINE ASSY
PCB ASSY,TIMING GENERATOR BOARD,AIT UV
ASSY,REMOVABLE HD,CONFIGURED,AIT UV
TESTED,MMD ANALOG UV (MMDAUV)
ASSY CHUCK,200MM ROUNDED PAD,AIT XP
CLAMP,7/8 HOSE,CRIMP TYPE,ONE EAR
ASSY,CBL,EMO/SYS CTRL,AIT UV-PILLAR BLKHD,65FT
ASSY,CBL,ETHERNET X-OVER,AIT UV-PILLAR BLKHD,65FT
ASSY,CBL,208VAC,PILLAR PDU-AIT CPM,65FT
ASSY,FIBER OPTIC,BUNDLED,AIT UV-PILLAR BLKHD,65FT
HOSE ASSY.,65FT,UV COH LASER
AODF,364NM  THIN PRESCAN
COLLECTOR ASSY FRONT AIT UV
PCB,ASSEMBLY,AIT4 GPIO BOARD
ASSY,COLLECTOR,NEAR NORMAL,AIT UV
COLLECTOR ASSY REAR AIT UV
CUBE POLARIZER ASSY AIT UV
ASSY,M2,NNC,AIT UV
ASSY,ASPHERE MOUNT,NNC,AIT UV
ASSY,POLARIZER,COLL SIDE,AIT UV
ASSY,POLARIZATION CHANGER,AIT UV
FILTER,AIR,IC
ASSY,CALCHIP,MOUNTED,AIT UV
POWER SUPPLY,12V,AC/DC CONVERTER,120/240VAC,75W
PCB ASSY,TESTED,APS3.5 PREAMP W/PSD
ASSY,BOX,REMOTE DISCONNECT,65FT PILLAR,AIT UV
ASSY,image computer, AIT UV, CE Mark
ASSY,LASER SERVO DETECT,AIT UV - higher level fru
ASSY,MAG CHANGER AIT UV
ASSY,APS/NNC TOWER,AIT UV
ASSY,PSF AND APERTURE,NNC,AIT UV
ASSY,PSF,COLL FRONT,AIT UV
ASSY,PSF,COLL REAR,AIT UV
FRU,KEYBOARD ASSY,PILLAR,AIT UV
FRU,DI/DO FILTER CARTRIDGE,LASER H.E.,PILLAR,AIT UV
PCB,ASSY,APS CONTROL BOARD,AIT UV
WATER,DISTILLED,1 GALLON
FRU,PCA,MMD ANALOG UV (MMDAUV)
FRU,ASSY,PRESCAN AOD DRIVER
FRU,ASSY,PRESCAN AOD DRIVER
VALVE,5-PRT,BASE-PROTED,12V,LED,NO-WIRES
ASYST S3 ADVANTAG STICK ANT KIT
ASSEMBLY,LEADSCREW,PORT DOOR,S2
LENS, MAG CHANGER 2.3X AIT UV
PCB,ASSY,APS-UV ,PREAMP TESTED WITH PSD
PCB,ASSY,APS-UV ,PREAMP TESTED WITH PSD
FRU,PCB ASSY,2D PSF DRIVER
FRU,PCB ASSY,2D PSF DRIVER
FRU,PCB,ASSY,APS4 CONTROLLER
FRU,PCB,ASSY,APS4 CONTROLLER
FRU,ASSY,PSF,COLL FRONT,AIT UVA+,INTEL A
FRU,TESTED,PCB ASSY,CPU,2.4GHZ/1GB,CONFI
FRU,TESTED,PCB ASSY,CPU,2.4GHZ/1GB,CONFI
FRU,PCB ASSY,GPIO
FRU,ASSY,HARD DRIVE ,AIT UVA PLUS ,V6.2
UV LASER POWER SUPPLY, AIT UV
UV LASER POWER SUPPLY, AIT UV
UV LASER HEAD,AIT,364NM
UV LASER HEAD,AIT,364NM
UV LASER HEAD,AIT,364NM
ASSY TESTED,HOSE,SST FTG,65FT,UV LASER
FRU,PSF,REAR,AIT XUV,STD
PACKAGED,ASSY,LSR SERVO DETECTOR,AIT UV
PACKAGED,ASSY,LSR SERVO DETECTOR,AIT UV
LENS ZOOM, NOMINAL C-T 148400-03
LENS ZOOM, NOMINAL C-T 148400-03
DISPLAY,FLAT PNL, 15",SP1-TBI
ASSY, HD, FRU MADE, V6.2.34.5
ASSY, HD, FRU MADE, V6.2.34.5
LINK MANAGER EP2,ADVANTAG CID,ASYST
ASSEMBLY, MOTOR, APHD S3
ASSEMBLY, MOTOR, POD ADV, S3
ASSEMBLY, MOTOR, POD ADV, S3
ASSEMBLY, MOTOR, POD ADV, S3
SENSOR,PERIMETER,RECEIVER,ISOPORT
KIT, LASER PSU FLOWMETER REPAIR
ASSY,LEADSCREW,POD ADVANCE,S3,LDPT
FRU,CHEM FILTER,TOP AND BOTTOM,REPLACEME
FRU KIT, BEAMSPLITTER/PICKOFF
FRU,ASSY,CHIRP AOD DRIVER
HEAT EXCHANGER,UV LASER,CB4
CBL ASSY,SCSI DATA,CPU/P13 - HDD'S,AIT U
FRU KIT,ASSY,CALCHIP,MOUNTED,AITXUV
FRU KIT,ASSY,REMOVABLE IADC HD,UNCONFIGU
FRU KIT,ROBOT,EQUIPE,ABM407-1-S-B-CE-S2
PCB ASSY,KB/TB2 KEYS,S8000
PCB ASSY,KB/TB2 KEYS,S8000
PIEZO ASSY,THETA-Z,AIT2
MOTOR ASSY,X-OFFSET,AIT2
MULTIPLIER,MXH-100,AEROTECH ENCODER
FRU,DI/DO FILTER CARTRIDGE,LASER H.E.,RAPID
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Note: some parts have multiple revision numbers but are cross compatible. Contact us for clarification.