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KLA Tencor Spare Parts
Scroll through the list below or use the search function. To find all compatible parts, search main part number only, leaving out the revision numbers. 
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004"). 
Search Part Number or Description
Please Contact Us for any KLA Tencor spare part not listed here.
Spare Parts Listing for SP2
Tool Type
SP2 Surfscan
SP2 Surfscan
OEM Part Number
0092416-001
0113630-000
OEM Description
POWER SUPPLY W/DIODE, UV LASER, J40 355MW
LASER HEAD, UV, 355MW, UNCOATED SESAM
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