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KLA Tencor Spare Parts
Scroll through the list below or use the search function. To find all compatible parts, search main part number only, leaving out the revision numbers. 
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004"). 
Search Part Number or Description
Please Contact Us for any KLA Tencor spare part not listed here.
Spare Parts Listing for  A200
Tool Type
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
A200 Overlay
OEM Part Number
0320071-000
0056897-000
0391622-000
0328684-000
0101045-000
0101050-000
0090335-000
0101054-000
0128926-000
0125690-002
750-480037-001
0105670-001
0091811-001
0115080-002
0094655-000
0086469-004
0086470-003
0086472-003
0011286-000
0096099-000
0086271-001
0202073-001
0059515-000
0059518-001
501-400199-001
0101528-000
OEM Description
HLS100 LAMP MODULE-KIT
Vacuum Filter
Shutter Assy
ETEL X/Y/T Stage
ETEL DSCDL - X/Y Linear Axis Motor Controller
ETEL DSCDP - Z1 & T Axis Motor Controller
ETEL DSCDM - L  Axis Motor Controller
ETEL DSMAX2 - Communication Controller
Linnik Camera
CTC-1 PLUS ACTIVE ISOLATION SYSTEM
IDE CONTROLLER FOR CTC-1
A200 Interface Board
HLS (Halogen Light Source) Assembly, Full
LIGHT WHEEL ASSY B-TYPE,HLS100
EXTENDED LIFETIME LLG (New)
AMS Low Mag 535 Assy
AMS High Mag 535 Assy
PNEUMATIC BOX, COMET
PTZ Driver Board (PTZ  P & Z)
PTZ Controller Board
FD - Focus Detector
COMPUTER V2 BUILD2
A20 FEEDBACK PZT CONTROLLER BO
A20 FEEDBACK PZT DRIVER BOARD
LINNIK INTERFEROMETER REFERNCE
ROBOT,YASKAWA,Z524I,220V
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