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KLA Tencor Spare Parts
Scroll through the list below or use the search function. To find all compatible parts, search main part number only, leaving out the revision numbers. 
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004"). 
Search Part Number or Description
Spare Parts Listing for Overlay Archer 10 / XT / AIM+
Please Contact Us for any KLA Tencor spare part not listed here.
Note: some parts have multiple revision numbers but are cross compatible. Contact us for clarification.
Tool Type
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
Archer / XT / AIM / AIM+
OEM Part Number
0011283-000
0011286-000
0011290-001
0013688-000
0049230-002
0050576-000
0051644-000
0056897-000
0059514-000
0059515-000
0059518-000
0059518-001
0084370-000
0090335-000
0092323-004
0094655-000
0099690-000
0101045-000
0101045-000
0101050-000
0101054-000
0101528-000
0101529-002
0101529-002
0101812-001
0101892-001
0106421-001
0107637-000
0115080-002
0125690-002
0125690-002
0145977-000
0204187-000
0230934-000
0230934-000
0236756-000
0239387-000
0246172-000
0281960-000
0320071-000
0322658-000
0328684-000
0364394-000
0391622-000
0553216-000
0560669-000
064-480374-000
127-483105-000
501-400199-001
501-680368-000
710-482350-000
716-480011
716-480011-006
716-480428
720-480036-000
750-480037-000
750-482414-000
750-482417-000
750-482418-000
0047044-000
OEM Description
CCD COHU CAMERA (Linnik)
PZT Driver Board
RADISYS - Archer10 Computer Platform
CCD COHU CAMERA (Linnik)
ICS - Archer10 Computer Platform
Z Motor & Encoder Replacement
INTERFACE BOARD ASSY
Vacuum Filter
TRENTON - Archer XT & AIM Computer Box
A20 FEEDBACK PZT CONTROLLER BO
PZT Driver Board
A20 FEEDBACK PZT DRIVER BOARD
KIT,YASKAWA CONTROLLER,BATTERY
ETEL DSCDM - L  Axis Motor Controller (AIM+)
PREALIGNER,ASSY,YASKAWA,3-AXIS
EXTENDED LIFETIME LLG
COMET - Archer AIM Computer Platform
ETEL DSCDL - X/Y Linear Axis Motor Controller (AIM+)
XY DRIVER DSCDL W/DSO-HI0111
ETEL DSCDP - Z1 & T Axis Motor Controller (AIM+)
ETEL DSMAX2 - Communication Controller (AIM+)
ROBOT,YASKAWA,Z524I,220V
Phoenix Yaskawa Robot Controller NXC100
KIT,CONTROLLER AND CABLES,YASK
AC/DC UNIVERSAL,PC,P-SUP,SWIT
COMET COMPUTER,NEW SCSI,AIM+
ANTENNA, ISOPT,4FT,53.5UH
FAN ASSY,HLS100
LIGHT WHEEL ASSY B-TYPE,HLS100
ACTIVE ISOLATION SYSTEM IDE
CTC-1 PLUS ACTIVE ISOLATION SY
CONTROLLER,FLOTATION,CTC
XY MOVING CABLES
XYT STAGE BO Scheenberger
XYT Stage B0 Octopus-FRU Assem
READER,RFID,ADVANTAG ATR9100
ARCHER 10 PDA
DYNAMIC CBL FRU KIT FOR SCHEN56
5300 AMS - FRU ASSEMBLY
HLS100 LAMP MODULE-KIT
FRU, ASSEMBLY COMET INTERFACE
STAGE, XYT NSK, ETEL
FRU KIT, ROBOT, EQUIP, ABM407B
FRU KIT, AIM+ SHUTTER SUBASSY
SHUTTER ASSY, ARCHER100 TESTED
PKG,FRU,HLS100 LAMP MODULE
VACUUM PANEL (All components)
Halogen Lamp 12V / 50W
LINNIK INTERFEROMETER REFERNCE
LAMP, XENON, 150W (MPX only)
5300NT PDA BOX ASSEMBLY (10/XT/XT+)
ACTIVE ISOLATION SYSTEM IDE
FLOAT SYS & CONTR / 3000187-000
XYT STAGE BO Scheenberger
AMS Camera Assy Unit
IDE CONTROLLER FOR CTC-1
ETEL DRIVER SCHN Y/X - DSB2 Nanometer
ETEL DRIVER Motion Cont. L  / T / Z - DSB2
ETEL DRIVER Motion Cont.  PS1 Power Supply
ICS-ADVENT COMPUTER BOX, ASSY