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KLA Tencor Spare Parts
Scroll through the list below or use the search function. To find all compatible parts, search main part number only, leaving out the revision numbers. 
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004"). 
Search Part Number or Description
Please Contact Us for any KLA Tencor spare part not listed here.
Spare Parts Listing for 2367
Tool Type
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
Brightfield 2367
OEM Part Number
0101705-000
0537672-000
0063965-000
0095216-000
0076508-000
0276654-000
0119930-000
0101704-000
0101705-000
770-773250-001 
770-773260-001 
740-772900-001
0115275-002
0110371-000
OEM Description
ASSY, TESTED, G5 X-SERVER NODE
ASSY, TDI,FRU,SYS TESTED, V2,V3 (Repair only: 2-3 weeks FRO)
SOC2 BOARD
Gigabit Switch 24 Port Switch
TESTED SDB1600MPX V2
FRU ASSY, TESTED POWER SUPPLY, M31 HOST/N
ASSY TESTED G5 X
ASSY, TESTED, G5 X
ASSY, TESTED, G5 X
Assy, PS1  (System Power Supply 1)
ASSY, PS2,36/56VDC 91XX,93XX,2367
Assy, PS3 (System Power Supply 3
COMP, DELL 2800,INTIGRATED,SCC PUMA
COMP, DELL 2800,INTIGRATED,SCC PUM
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