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KLA Tencor Spare Parts
Scroll through the list below or use the search function. To find all compatible parts, search main part number only, leaving out the revision numbers. 
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004"). 
Search Part Number or Description
Please Contact Us for any KLA Tencor spare part not listed here.
Spare Parts Listing for Puma
Tool Type
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
Puma 9XXX
OEM Part Number
0233215-000
0107804-000
0107802-000
0209135-000
0124615-001
0140839-000
0276654-000
0119930-000
0101704-000
0101705-000
0249573-000
0249574-000
0249575-000
OEM Description
LASERHEAD,2.5W,355NM,'T'MOUNT,GEN 3
DIODE, 2.5W 355NM ML LASER Power Supply Without DM
2.5 Watt 355NM ML laser Power Supply Without DM
CHILLER, THERMOCUBE
FRU, 9100 FF ASSY (Fourier Filter - Repair Only)
SWITCH,ENET,GIGABIT,24PORT,PROGRAMMED
FRU ASSY,TESTED POWER SUPPLY, M31 HOST/N
ASSY TESTED G5 X-SERVER RTAP (Apple G5 PC)
ASSY, TESTED, G5 X-SERVER HOST-2367 (Apple G5 PC)
ASSY, TESTED, G5 X-SERVER NODE (Apple G5 PC)
KIT, FRU, FF, CH1, HDR (Fourier Filter - Repair Only)
KIT, FRU, FF, CH2, HDR (Fourier Filter - Repair Only)
KIT, FRU, FF, CH3, HDR (Fourier Filter - Repair Only)
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