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Copyright © 2018 PSL Metrology Group
KLA Tencor Spare Parts
PSL Metrology carry a wide selection of KLA Tencor related wafer handler systems such as:
- PRI-Brooks & Yaskawa robots, pre-aligners & controllers.
- Asyst Series 3 & IsoPort load ports 
Select (click) on the platform name below  for our parts lists.  Or  you can search our available spare list using the search function.
To find all compatible parts, search main part number only, leaving out the  revision numbers. 
For example: OEM Part Number "013456-004" just search "013456" leaving out the last 3 digits ("-004").
Search Part Number or Description
Please Contact Us for any KLA Tencor
spare part not listed here.